Furnace Processing Systems
ASTRA Control System
Gas Systems and Liquid Source Delivery Systems
Custom fabrication and assembly for specialized applications.
Load Stations and Loading Systems
Paddle and twin rod cantilever loading systems, push/pullers and auto lifters.
Source Gas Cabinets and Source/Vacuum Pump Cabinets
Stand-alone or stacked pump cabinets with vacuum pump and control systems.
VAF - Vacuum Annealing Furnace System
Applicable to metallization anneal/alloy and anneal of antireflective solar cell coatings and other materials.
Retrofits and Components
DS Fibertech Corporation is a recognized leader in Applied Thermal Technology with over 50 years of combined experience and is a global OEM supplier of custom equipment and component designs. We offer the following products and services;
Electric Furnace Systems which operate in Air or Inert Gas to 3000 F (1650˚C)
- Heating chambers for :
- Wafer Processing Furnaces
- Muffle Furnaces
- Industrial Processing
- Ceramic Vacuum Formed Fibrous Components including:
- Heating Elements
- Custom Shapers
- High Temperature Gaskets & Seals for door jams, pillows etc.
- Foundry service: We offer a complete line of heating and insulation products
Furnace Elements and Insulation Products
Heating Chambers for:
Custom laboratory and Industrial Processing
Solid Oxide Fuel Cell (SOFC) Testing
Semiconductor Diffusion Heater Element Refurbishment
Each rebuilt diffusion heater element is carefully reverse engineered to assure exact replication of the original diffusion heater. Element
components are the same as used by the OEM. Refurbished elements will have the dimensional, electrical, and operating characteristics of the original OEM.
Ceramic Vacuum Formed Fibrous Components including:
High Temperature Gaskets & Seals for door jams, pillows etc.
Foundry Service for a complete line of heating and insulation products
Including SVG Thermco, TEL & Novus
Founded in 1979 in Silicon Valley, USA, Fortrend has served as an innovative original equipment manufacturer for the Semiconductor and PV industries. For over thirty five years Fortrend products have become the crucial automation connections among different processing equipment.
Fortrend continues to develop its innovative automation technology for extensive use in the semiconductor industry. Fortrend is an industry leader in the design and manufacturing of automated SMIF handling equipment and its SCARA robots.
Vacuum and Convection Ovens
FLO-10C-12W Thermal Chamber
performance ISO Class 4 Cleanliness oven for wafers up to 300mm and temperatures up to 250C ideal for applications such as;
- Moisture removal
- Single layer thermal processing
Its superior ISO Class 4 cleanness is suitable for baking processes of semiconductor wafers, MEMS, LED and touch panels.
Wafer Baking Oven System SIO-300-200-2
load ports, wafer robot, cassette robot, YES series oven and control unit
200mm cassette manual/auto load available
Temperature Range: Ambient~250 degree C
Uniformity: ± 3 degree
Cleanness of System: Class 1
Cleanness of Oven: Class 10
N2 bake oven
High Temperature Vacuum Cure Oven SIO-300-450-1 and SIO-300-450-2( dual chamber)
Process capabilities are;
- Polyimide Cure
- BCB cure
- Photoresist Cure
- Copper Anneal
- Copper Oxide Removal
200mm Wafer auto load available Continuous horizontal lamina flow of N2
Low O2 < 10 ppm
Process temperature range 150~450 °C
Temperature uniformity better than ± 3.5 °C
Maximum heating ramp 8°C/min, and cooling 6°C/min (depends on chamber temperature)
Thermocouples, RTD’s and Sensors
Vacuum Process Sensors
Ultra-High Temp Probes
most advanced line of temperature sensors for extreme process applications.
General Purpose RTD Probes
These sensing probes are inherently more accurate than a thermocouple over a narrow temperature range and are often used where high temperature capability is not required.
Other product lines available;
Bendable tube thermocouples
General purpose thermocouple probes.