Thermal Processing

RCH Associates specializes in new LPCVD/Diffusion systems as well as replacement OEM gas systems (Thermco, Bruce, Tempress, ACS, etc.) fully retrofittable into existing or remanufactured source cabinets. RCH’s portfolio of products and capabilities extends from basic Bench Top Furnaces or Research Grade systems to high production, full capability horizontal stacks.

Diffusion, Oxidation and LPCVD furnace processing systems for semiconductor and solar applications.

RCH Associates’ flagship product that provides total programming, operation and data management of diffusion and LPCVD furnace processing systems. Provides full computer power per tube-level with graphical, touch screen program access.

Gas systems and liquid source delivery systems for diffusion and LPCVD processing.
Custom fabrication and assembly for specialized applications.

Clean room load stations.
Paddle and twin rod cantilever loading systems, push/pullers and auto lifters.

Fully facilitated gas source cabinets configured for atmospheric or LPCVD processes.
Stand-alone or stacked pump cabinets with vacuum pump and control systems.

Specialized vacuum furnace system for thin film thermal processing of wafers and substrates that are sensitive to oxidation.
Applicable to metallization anneal/alloy and anneal of antireflective solar cell coatings and other materials.

Atmospheric and LPCVD processing systems retrofittable to most existing and new furnace system. “Fast Flange” assemblies, elements and gas systems. Quartz and silicon carbide components. Replacement and spare parts.

DS Fibertech Corporation is a recognized leader in Applied Thermal Technology with over 50 years of combined experience and is a global OEM supplier of custom equipment and component designs. We offer the following products and services;

Electric Furnace Systems which operate in Air or Inert Gas to 3000 F (1650˚C)

• Heating chambers for :
• Wafer Processing Furnaces
• Muffle Furnaces
• Industrial Processing
• Ceramic Vacuum Formed Fibrous Components including:
• Heating Elements
• Custom Shapers
• High Temperature Gaskets & Seals for door jams, pillows etc.
• Foundry service: We offer a complete line of heating and insulation products

Electric Furnace Systems which operate in Air or Inert Gas to 3000 F.

Wafer Processing Furnaces
Solar Furnaces
Muffle Furnaces
Custom laboratory and Industrial Processing
Solid Oxide Fuel Cell (SOFC) Testing

For OEM elements including; Tokyo Electron (TEL), Hitachi Kokusai, Axcelis, Silicon Valley Group (SVG) and various other oem models.

Each rebuilt diffusion heater element is carefully reverse engineered to assure exact replication of the original diffusion heater. Element
components are the same as used by the OEM. Refurbished elements will have the dimensional, electrical, and operating characteristics of the original OEM.

Heating Elements and Custom Shapes
High Temperature Gaskets & Seals for door jams, pillows etc.
Vestibule Blocks
Foundry Service for a complete line of heating and insulation products

DS Fibertech offers both high and low flow torch elements with an improved design allowing for greater radiant energy pass through. They offer an extensive line of replacement torches for most major brands.
Including SVG Thermco, TEL & Novus

Founded in 1979 in Silicon Valley, USA, Fortrend has served as an innovative original equipment manufacturer for the Semiconductor and PV industries. For over thirty five years Fortrend products have become the crucial automation connections among different processing equipment.

Fortrend continues to develop its innovative automation technology for extensive use in the semiconductor industry. Fortrend is an industry leader in the design and manufacturing of automated SMIF handling equipment and its SCARA robots.

The SunRay FLO-10C-12W Thermal Chamber is a high
performance ISO Class 4 Cleanliness oven for wafers up to 300mm and temperatures up to 250C ideal for applications such as;

• Moisture removal
• Re-flow
• Single layer thermal processing

With its proprietary multi-zone coordinated heating control technology, the temperature uniformity is better than ± 3.5°C under wide operation temperature with gas consumption programmable from 0 to 50 litre per minutes.
Its superior ISO Class 4 cleanness is suitable for baking processes of semiconductor wafers, MEMS, LED and touch panels.

The Oven system has integrated mini-environment, 300mm
load ports, wafer robot, cassette robot, YES series oven and control unit
200mm cassette manual/auto load available
Fully automatic
Temperature Range: Ambient~250 degree C
Uniformity: ± 3 degree
Cleanness of System: Class 1
Cleanness of Oven: Class 10
N2 bake oven

Fortrend-YES have partnered to develop the SIO-300-450 series of High temperature, Air cooled, Controlled process gas composition, Laminar cross flow, Vertical, vacuum ovens

Process capabilities are;

• Polyimide Cure
• BCB cure
• Photoresist Cure
• Copper Anneal
• Copper Oxide Removal

Up to 300mm capacity of wafer 50 each chamber
200mm Wafer auto load available Continuous horizontal lamina flow of N2
Low O2 < 10 ppm
Process temperature range 150~450 °C
Temperature uniformity better than ± 3.5 °C
Maximum heating ramp 8°C/min, and cooling 6°C/min (depends on chamber temperature)
N2 pre-heating

Vulcan, formed in 1927, are one of only a few manufacturers with a full complement of metal-sheathed heaters, temperature sensors, temperature control products and precision calibration services. Many of their temperature measurement products are engineered into equipment at the world's leading semiconductor companies. Other areas of temperature sensor expertise include ultra-high temperature materials processes and other advanced metallurgical applications. Their Flexible Interconnect solutions include a broad range of capabilities in flexible circuits, flexible wiring harnesses, and electrical testing services.

Vulcan ElectricThermocouples are high-precision temperature sensor constructions designed and manufactured primarily for the Semiconductor, Solar and LED industries. These thermocouples were engineered to address the critical process temperature measurement and control required for those industries.

The Vacuum Process Line of temperature sensors using the latest seal fitting technologies that can be designed to seal pressures ranging from vacuum up to 30,000 psi (2067 bars) and designed for durability and reliability

UHT Thermocouples are designed for extreme temperature, time and cycling. Our complete selection of thermocouple materials with superior performance characteristics and quality offer the
most advanced line of temperature sensors for extreme process applications.

Thermistors are ideal for temperature measurement where high sensitivity is required.
These sensing probes are inherently more accurate than a thermocouple over a narrow temperature range and are often used where high temperature capability is not required.

Heat and trace surface sensors
Bendable tube thermocouples
General purpose thermocouple probes.