PARTICLE DETECTION
SMART SENSOR
Another leading-edge solution from Sistem Technology’s Partners
We are excited to release a new product that detects particles in load ports, atmospheric wafer transfer areas, and other non-corrosive process environments.
The sensor samples air from the laminar flow of the environment to detect particles down to 0.3μm in size. It's small enough to be mounted inside a load port or wafer transfer area to provide continuous particle monitoring 24 hours a day.
The quantity and concentrations for 0.3μm, 0.5μm, 1μm, 2.5μm, 4.0μm and 10μm particles can be viewed at the equipment using an optional OLED display.
The count, concentration, and/or average size for a user defined particle size range is logged for up to one year with our Data Acquisition Smart Sensor platform.
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